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Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges

ORCID
0000-0003-4383-0736
Affiliation
Institute for Surface Technology, Technical University Braunschweig
Grein, Maria;
ORCID
0000-0003-3661-4242
Affiliation
Institute for Surface Technology, Technical University Braunschweig
Gerstenberg, Jessica;
Affiliation
Institute of Microtechnology, Technical University Braunschweig
von der Heide, Chresten;
ORCID
0000-0001-9841-8728
Affiliation
Fraunhofer Institute for Surface Engineering and Thin Films (IST)
Bandorf, Ralf;
Affiliation
Institute for Surface Technology, Technical University Braunschweig
Bräuer, Günter;
ORCID
0000-0003-2090-6259
Affiliation
Institute of Microtechnology, Technical University Braunschweig
Dietzel, Andreas

Niobium-containing diamond-like carbon films (a-C:H:Nb) were deposited in a hybrid plasma-enhanced chemical vapor deposition (PECVD) and direct-current magnetron sputtering (DCMS) process, using a niobium target in an argon/acetylene atmosphere on industrial polyimide foil, spin-coated polyimide foil, and alumina substrates. While the coating on the industrial foil tends to crack, the thin films on the spin-coated polyimide and the ceramic substrates showed good adhesion, as well as a smooth and dense topography. Investigations of the electrical properties revealed their suitability as biocompatible sensor materials in strain gauges, with a gauge factor of up to 3.2 and a temperature coefficient of the electrical resistance (TCR) of −200 ppm/K

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